Morphological and electrical characterization of 130nm Interdigitated Electrode (IDE)

N.K.S Nordin, U. Hashim, A. Ayoib, V. Thivina


Biosensor is the application of sensor that widely applied and still progressing until today. One of the applications of biosensor is Interdigitated Electrode (IDE) that composed of finger of electrodes and a pair of pad. Nanogap is the gap between the electrodes that can determine the sensitivity of the device. In this experiment, 130nm of IDE is tested with the electrical measurement and showed the positive result which is 2.0x10-10 at 0.2 V. The Scanning Electron Microscopy (SEM) of the device showed the small gap is used for better sensitivity without deposite anything on the probe. In the future, this IDE can be used for coating with metal oxides for better performance of the device.


Interdigitated Electrode (IDE); Electrode Gap; Electrical Measurement (I-V); Scanning Electron Microscopic (SEM)

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